Thin films growth by PIIID technique from hexamethyldisilazane/argon mixture
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چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Surface and Coatings Technology
سال: 2015
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2015.09.063